Fabrication and measurements of direct contact type RF MEMS switch
نویسندگان
چکیده
منابع مشابه
Surface roughness, asperity contact and gold RF MEMS switch behavior
Modeling predictions and experimental measurements were obtained to characterize the electro-mechanical response of radio frequency (RF) microelectromechanical (MEM) switches due to variations in surface roughness and finite asperity deformations. Three-dimensional surface roughness profiles were generated, based on a Weierstrass–Mandelbrot fractal representation, to match the measured roughnes...
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ژورنال
عنوان ژورنال: IEICE Electronics Express
سال: 2007
ISSN: 1349-2543
DOI: 10.1587/elex.4.319